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Imec, the world-leading research and innovation hub in nanoelectronics and digital technology, continues to advance the readiness of EUV lithography with particular focus on EUV single exposure of Logic N5 metal layers, and of aggressive dense hole arrays. Imec's approach to enable EUV single patterning at these dimensions is based on the co-optimization of various lithography enablers, including materials, metrology, design rules, post processing and a fundamental understanding of critical EUV processes. The results, that will be presented in multiple papers at this week's 2018 SPIE Advanced Lithography Conference, are aimed at significantly impacting the technology roadmap and wafer cost of near-term technology nodes for logic and memory.
With the industry making significant improvements in EUV infrastructure readiness, first insertion of EUV lithography in high-volume manufacturing is expected in the critical back-end-of-line metal and via layers of the foundry N7 Logic technology node, with metal pitches in the range of 36–40nm. Imec's research focuses on the next node (32nm pitch and below), where various patterning approaches are being considered. These approaches vary considerably in terms of complexity, wafer cost, and time to yield, and include variations of EUV multipatterning, hybrid EUV and immersion multipatterning, and EUV single expose. At SPIE last year, imec presented many advances in hybrid multipatterning and revealed various challenges of the more cost-effective EUV single exposure solution. This year, imec and its partners show considerable progress towards enabling these dimensions with EUV single exposure.
Imec - Path - Co-optimization - Lithography - Enablers
Imec's path comprises a co-optimization of various lithography enablers, including resist materials, stack and post processing, metrology, computational litho and design-technology co-optimization, and a fundamental understanding of EUV resist reaction mechanisms and of stochastic effects. Based on this comprehensive approach, imec has demonstrated promising advances including initial electrical...
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